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SEMI MF1569 –– Guide for Generation of Consensus Reference Materials for Semiconductor Technology
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SEMI E54-0997 (technical revision - replaces SEMI E65)
MS00900 - SEMI MS9 - Specification for High Density Permanent Connections Between Microfluidic Devices StdTpc-Anti-Counterfeiting SEMI MF1569 –– Guide forThis Standard was technically approved by the global MEMS NEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2011. Available at www. semiviews. org and www. semi. org in June 2011. This Standard provides specification for interconnection dimensions and performance requirements for permanent microfluidic interfaces. It also provides guidance for interface design. This will help to enable low
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